ALIO INDUSTRIES JOINS NSF CENTER FOR EXTREME ULTRAVIOLET SCIENCE AND TECHNOLOGY

Nano Precision Motion an Enabler of Extreme Ultraviolet Research
WHEAT RIDGE, Colorado (April 24, 2007) – ALIO Industries a leading developer of nano
precision motion systems and robotics has joined the National Science Foundation’s Engineering Research Center for Extreme Ultraviolet Science and Technology (EUV ERC). ALIO has developed an extensive product line of motions systems and robotics that deliver nanometer precision motion. ALIO’s technology will play an important role in furthering research at the EUV ERC laboratories.

ALIO’s motion systems and robotics enable nanometer scale motion that meets the needs of researchers around the world as well as industries in areas of technology such as photonics, semiconductor, flat panel display and biomedical applications. Said Jeff Johnson, President of ALIO Industries, “When we learned about the world class research taking place at the NSF ERC, in particular the short wavelengths their lasers were capable of, and the types of experiments they were conducting, we knew there was a good fit. For example, we are providing a nanometer precision system for nano patterning and the production of quantum dots”.

Jorge Rocca, Professor of Electrical Engineering at CSU and Director of the EUV ERC, added: “Having ALIO join the Industry Alliance Board of NSF ERC is significant as precise motion control is critical to the expanding uses of EUV into industrial applications. We are especially pleased to see ALIO join an impressive and growing industry membership who will see the very latest of the possibilities from the research done at the EUV ERC and push forward the commercialization of the work.


About ALIO Industries
ALIO Industries is a leading innovator and manufacturer of motions systems and robotics for nanometer precision applications in nanotechnology, semiconductor, photonics, biomedical, flat panel display, data storage and other industries requiring the most precise motion in the world market. The company has developed a diverse portfolio of products to address the increasing number of industries and applications requiring extremely precise motion. These products include hexapod and tripod robots as well as standard linear stages for applications in standard atmosphere, high vacuum and ultrahigh vacuum environments. Additionally, ALIO produces air bearing stages for large scale metrology and lithography applications.

Reasons to use the ALIO Industries Hexapod Robotics

Why Hexapod Robots and Parallel Kinematics Advantages of Parallel Kinematics Micro- and Nanopositioning Systems:
Lower Inertia Better Dynamic Behavior Smaller Package Size Higher Stiffness No Accumulation of Position Errors Reduced Runout Errors No Moving Cables: Better Repeatability and Reliability Alio Industries, Inc